Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
Demonstration of flexible thin film transistors with GaN channels
Type:
Journal
Info:
Applied Physics Letters 109, le{doi:10.1063/1.4971837 (2016)
Date:
2016-11-25
Author Information
Name | Institution |
---|---|
S. Bolat | Bilkent University |
Z. Sisman | Bilkent University |
Ali Kemal Okyay | Bilkent University |
Films
Plasma GaN
Plasma Al2O3
Film/Plasma Properties
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
Al |
SiO2 |
Keywords
Notes
852 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |