Ferroelectricity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ferroelectricity returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
2Sub-7-nm textured ZrO2 with giant ferroelectricity
3Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
4Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
5Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
6Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
7Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
8Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
9Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
10Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing