Ferroelectricity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ferroelectricity returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
2Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
3Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
4Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
5Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
6Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate