Ferroelectricity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ferroelectricity returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
2Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
3Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
4Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
5Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
6Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
7Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
8Sub-7-nm textured ZrO2 with giant ferroelectricity