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Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon|
|2||A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated Circuit using Manufacturable Atomic Layer Deposition Equipment|
|3||Atomic layer controlled deposition of silicon nitride with self-limiting mechanism|
|4||Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride|
|5||Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition|
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