DCS, H2SiCl2, DiChloroSilane, CAS# 4109-96-0

Where to buy

NumberVendorRegionLink
1Gelest🇺🇸Dichlorosilane
2Yoodatech (Shanghai) Co., LtdDCS, H2SiCl2, DiChloroSilane - contact maggie@yoodatech.com
3Pegasus Chemicals🇬🇧Dichlorosilane

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Silicon Nitride MIM Capacitor for Analog/Mixed-Signal Integrated Circuit using Manufacturable Atomic Layer Deposition Equipment
2Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
3Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition
4Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
5Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
6Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
7Challenges in spacer process development for leading-edge high-k metal gate technology
8Atomic layer epitaxy of Si using atomic H
9Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
10Atomic layer controlled deposition of silicon nitride with self-limiting mechanism