Critical Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Critical Temperature returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of titanium nitride for quantum circuits
2Microwave properties of superconducting atomic-layer deposited TiN films
3Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
4Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
5Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
6Plasma-enhanced atomic layer deposition of superconducting niobium nitride
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
9Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices