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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Critical Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Critical Temperature returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of titanium nitride for quantum circuits
2Microwave properties of superconducting atomic-layer deposited TiN films
3Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
4Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
5Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
6Plasma-enhanced atomic layer deposition of superconducting niobium nitride
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
9Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

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