Electron Temperature, Te Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Temperature, Te returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
2	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
3	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
4	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides

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