Electron Temperature, Te Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Temperature, Te returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature
2Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
3Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
4Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition
5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
6Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
7Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
8The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
9Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
10Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
11Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition