Your search for plasma enhanced atomic layer deposition publications discussing Electron Temperature, Te returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides|
|2||Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition|
|3||Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films|
|4||Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth|
|5||The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides|
© 2014-2019 plasma-ald.com