Electron Temperature, Te Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Electron Temperature, Te returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
2Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
3Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
4Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
5Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
6Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
7Selective composition modification deposition utilizing ion bombardment-induced interfacial mixing during plasma-enhanced atomic layer deposition
8Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
9The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides