TaCl₅, Tantalum Pentachloride, CAS# 7721-01-9

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Number	Vendor	Link
1	EpiValence	Tantalum chloride

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
2	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
3	Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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