TaCl5, Tantalum Pentachloride, CAS# 7721-01-9

Where to buy

NumberVendorRegionLink
1EreztechπŸ‡ΊπŸ‡ΈTantalum(V) chloride
2EpiValenceπŸ‡¬πŸ‡§Tantalum chloride
3Pegasus ChemicalsπŸ‡¬πŸ‡§Tantalum (V) Chloride

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
3The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
4The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
5Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
6The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
7Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
8Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
9Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper