TaCl₅, Tantalum Pentachloride, CAS# 7721-01-9

Where to buy

Number	Vendor	Link
1	Ereztech	Tantalum (V) chloride, sublimed (99.99+%-Ta)

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition
2	Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
3	Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
4	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
5	The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
6	Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
7	Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
8	The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
9	The physical properties of cubic plasma-enhanced atomic layer deposition TaN films

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