Adhesion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Adhesion returned 31 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
2	Thermal and plasma enhanced atomic layer deposition of SiO₂ using commercial silicon precursors
3	Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
4	Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaN_x on Adhesion with Copper
5	PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
6	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
7	Plasma-enhanced atomic layer deposition of Cuâ€“Mn films with formation of a MnSi_xO_y barrier layer
8	Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
9	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
10	Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
11	Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
12	Copper-ALD Seed Layer as an Enabler for Device Scaling
13	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
14	Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
15	Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
16	Hydrogen plasma-enhanced atomic layer deposition of copper thin films
17	Photocatalytic functional coatings of TiO₂ thin films on polymer substrate by plasma enhanced atomic layer deposition
18	Mechanical properties of thin-film Parylene-metal-Parylene devices
19	Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
20	Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
21	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO₂ as low-refractive index material
22	Capacitance spectroscopy of gate-defined electronic lattices
23	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
24	Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
25	In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuN_x Barriers for Seedless Copper Electroplating
26	Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
27	Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
28	Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
29	Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
30	Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
31	Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition

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Adhesion Plasma Enhanced Atomic Layer Deposition Publications