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Adhesion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Adhesion returned 31 record(s).

NumberTitle
1Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
2Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
3PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
4Capacitance spectroscopy of gate-defined electronic lattices
5Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
6High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
7Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
8Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
9Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper
10Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
11In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating
12Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
13Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
14Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
15Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
16Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
17Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
18Hydrogen plasma-enhanced atomic layer deposition of copper thin films
19Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
20Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
21Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
22Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
23Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
24Mechanical properties of thin-film Parylene-metal-Parylene devices
25Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
26Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
27Copper-ALD Seed Layer as an Enabler for Device Scaling
28Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films
29Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
30Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
31Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films