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Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

Type:
Journal
Info:
Journal of The Electrochemical Society, 158 (5) C132-C138 (2011)
Date:
2011-01-27
DOI:
http://dx.doi.org/10.1149/1.3560197

Author Information

Name Institution
Stephen E. PottsEindhoven University of Technology
L. SchmalzFEM Research Institute
M. FenkerFEM Research Institute
B. Dí­azFrench National Centre for Scientific Research (CNRS)
J. ŚwiatowskaFrench National Centre for Scientific Research (CNRS)
V. MauriceFrench National Centre for Scientific Research (CNRS)
A. SeyeuxFrench National Centre for Scientific Research (CNRS)
P. MarcusFrench National Centre for Scientific Research (CNRS)
György Zoltán RadnócziResearch Institute for Technical Physics and Materials Science
L. TóthResearch Institute for Technical Physics and Materials Science
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 50-150C

Thermal Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 150C

Film/Plasma Properties

Characteristic: Porosity
Analysis: CV, Cyclic Voltammetry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: -

Characteristic: Compositional Depth Profiling
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: -

Characteristic: Conformality, Step Coverage
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM20

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM20

Characteristic: Adhesion
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Philips CM20

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Corrosion
Analysis: NSS, Neutral Salt Spray
Diagnostic: -

Substrates

Al2024-T3 Aluminium
100Cr6 Steel

Notes

699