Your search for plasma enhanced atomic layer deposition publications discussing Effective Charge Density returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films|
|2||Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition|
|3||Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches|
|4||Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation|
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