Porosity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Porosity returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
4Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
5Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
6On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
7Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection


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