Porosity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Porosity returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
2	Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
3	Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
4	Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
5	On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
6	Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection

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