Your search for plasma enhanced atomic layer deposition publications discussing Porosity returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD|
|2||Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient|
|3||Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers|
|4||Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching|
|5||On the role of nanoporosity in controlling the performance of moisture permeation barrier layers|
|6||Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection|
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