Thermal Stability Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Stability returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
2A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
3Ru thin film grown on TaN by plasma enhanced atomic layer deposition
4Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
5Flexible insulator of hollow SiO2 spheres and polyimide hybrid for flexible OLED
6Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
7Enhanced Methanol Oxidation with Annealed Atomic Layer Deposited Platinum Nanoparticles on Carbon Nanotubes
8Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
9The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
10Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
11Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
12Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu