OES Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing OES returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
2Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
3Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
4Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
5Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
6Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
7A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
8Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films