2022 Year in Review

August 2023 Stats

The publication database currently has 1692 entries.

210 Films

283 Precursors

78 Dep Hardware Sets

255 Characteristics

94 Theses

5191 Authors

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2021 Year in Review

Recent Database Additions

Ferroelectricity of Hf_xZr_1-xO₂ thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CF_x and H fluxes Sub-10-nm ferroelectric Gd-doped HfO₂ layers

OES Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing OES returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
2	Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
4	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
5	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
6	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
7	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
8	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide