OES Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing OES returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
2	Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3	Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
4	Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
5	Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
6	Plasma enhanced atomic layer deposition of HfO₂ and ZrO₂ high-k thin films
7	Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
8	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth

Follow @PlasmaALDGuy

Shortcuts

Films

Deposition Hardware

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

About plasma-ald.com

© 2014-2019 plasma-ald.com