OES Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing OES returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
2Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
3A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
4Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
5Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
6Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system
7Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
8Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate