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An economical, compact inductively coupled plasma source.

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Efficiency Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Efficiency returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition precursor step repetition and surface plasma pretreatment influence on semiconductor-insulator-semiconductor heterojunction solar cell
2Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
3Study of GaP/Si Heterojunction Solar Cells
4Investigation of Atomic Layer Deposition Al2O3 Passivation for Screen-Printed Large-Area Solar Cells
5Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
6Excellent surface passivation of crystalline silicon by ternary AlxMg1-xOy thin films
7Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
8Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
9Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
10Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD
11Localized dielectric breakdown and antireflection coating in metal-oxide-semiconductor photoelectrodes
12Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell