Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
4Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
5Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
6Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
7Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
8The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides