Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
2Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
3Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
4Innovative remote plasma source for atomic layer deposition for GaN devices
5Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
6Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
7Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
8Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
9Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
10The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides