Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition|
|2||Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties|
|3||Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides|
|4||Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films|
|5||Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth|
|6||The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides|
© 2014-2019 plasma-ald.com