Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
3Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
4Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
5Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
6The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides


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