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Ion Energy Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
2Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
3Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
4Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
5Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
6Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
7Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
8Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
9Innovative remote plasma source for atomic layer deposition for GaN devices
10Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition
11Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
12Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
13The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides