Your search for plasma enhanced atomic layer deposition publications discussing Ion Energy returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides|
|2||Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films|
|3||Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth|
|4||The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides|
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