İnci Dönmez Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by İnci Dönmez returned 17 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2Atomic layer deposition of GaN at low temperatures
3Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
4Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
5Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6Electrical characteristics of β-Ga2O3 thin films grown by PEALD
7Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
8Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
9Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
10Plasma-Enhanced Atomic Layer Deposition of III-Nitride Thin Films
11Self-Limiting Growth of GaN at Low Temperatures
12Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
13Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
14Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
15Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
16The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
17The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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