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Hardness Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Hardness returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
2TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition
3Tribological properties of thin films made by atomic layer deposition sliding against silicon


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