Your search for plasma enhanced atomic layer deposition publications discussing Hardness returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films|
|2||Highly reflective polymeric substrates functionalized utilizing atomic layer deposition|
|3||TiN/AlN Nano Multilayers Film Fabricated by Plasma Enhanced Atomic Layer Deposition|
|4||Tribological properties of thin films made by atomic layer deposition sliding against silicon|
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