Ion Flux Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Flux returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
2Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
3Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
4Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
5Innovative remote plasma source for atomic layer deposition for GaN devices
6Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition
7Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
8The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
9Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
10Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition