Ion Flux Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ion Flux returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Enhanced interfacial reaction of precursor and low temperature substrate in HfO2 atomic layer deposition with highly Ar diluted O2 plasma
2Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
3Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
4Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
5Low-energy high-flux ion bombardment-induced interfacial mixing during Al2O3 plasma-enhanced atomic layer deposition
6Innovative remote plasma source for atomic layer deposition for GaN devices
7Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
8Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
9Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
10The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides