Strain Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Strain returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
2The role of plasma in plasma-enhanced atomic layer deposition of crystalline films