Strain Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Strain returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
2Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
3Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
4Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
5The role of plasma in plasma-enhanced atomic layer deposition of crystalline films