The publication database currently has 1516 entries.
Search from:
189 Films Compositions
401 Precursors and Plasma Gases
74 Deposition Hardwares
238 Film and Plasma Characteristics
79 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
About plasma-ald.com
Contact Us
Advertising
Recent Database Additions
Co/CoP Nanoparticles Encapsulated Within N, P-Doped Carbon Nanotubes on Nanoporous Metal-Organic Framework Nanosheets for Oxygen Reduction and Oxygen Evolution Reactions
Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices
Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
Search 1516 plasma ALD publications by:
Search 1516 plasma ALD publications by:
Publication Information
Title:
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Applied Surface Science Volume 315, 1 October 2014, Pages 110-115
Date:
2014-07-19
Author Information
| Name | Institution |
|---|---|
| Jian Zhang | Zhejiang University |
Films
Film/Plasma Properties
Substrates
Keywords
| Resistance RAM |
Notes
| 243 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |