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Search 1536 plasma ALD publications by:
Publication Information
Title:
Bipolar resistive switching properties of AlN films deposited by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Applied Surface Science Volume 315, 1 October 2014, Pages 110-115
Date:
2014-07-19
Author Information
Name | Institution |
---|---|
Jian Zhang | Zhejiang University |
Films
Film/Plasma Properties
Substrates
Keywords
Resistance RAM |
Notes
243 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |