Breakdown Voltage Lifetime Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Breakdown Voltage Lifetime returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
2	Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
3	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films

Shortcuts

© 2014-2018 plasma-ald.com