Breakdown Voltage Lifetime Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Breakdown Voltage Lifetime returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Al₂O₃/SiO₂ nanolaminate for a gate oxide in a GaN-based MOS device
2	Improvements on Interface Reliability and Capacitance Dispersion of Fluorinated ALD-Al₂O₃ Gate Dielectrics by CF₄ Plasma Treatment
3	Plasma-assisted atomic layer deposition of TiN/Al₂O₃ stacks for metal-oxide-semiconductor capacitor applications
4	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films

Follow @PlasmaALDGuy

Mark Sowa

Shortcuts

Films

Precursors

Deposition Hardware

Authors

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

About plasma-ald.com

ALD Links