Your search for plasma enhanced atomic layer deposition publications discussing Breakdown Voltage Lifetime returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications|
|2||The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films|
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