Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range

Type:
Journal
Info:
AIP ADVANCES 6, 095014 (2016)
Date:
2016-09-06

Author Information

Name Institution
Yunqiu WuUniversity of Electronic Science and Technology of China
Yun WuNanjing Electronic Device Institute
Kai KangUniversity of Electronic Science and Technology of China
Yuanfu ChenUniversity of Electronic Science and Technology of China
Yanrong LiUniversity of Electronic Science and Technology of China
Tangsheng ChenNanjing Electronic Device Institute
Yuehang XuUniversity of Electronic Science and Technology of China

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

Graphene

Notes

849