Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
Characterization of CVD graphene permittivity and conductivity in micro-/millimeter wave frequency range
Type:
Journal
Info:
AIP ADVANCES 6, 095014 (2016)
Date:
2016-09-06
Author Information
Name | Institution |
---|---|
Yunqiu Wu | University of Electronic Science and Technology of China |
Yun Wu | Nanjing Electronic Device Institute |
Kai Kang | University of Electronic Science and Technology of China |
Yuanfu Chen | University of Electronic Science and Technology of China |
Yanrong Li | University of Electronic Science and Technology of China |
Tangsheng Chen | Nanjing Electronic Device Institute |
Yuehang Xu | University of Electronic Science and Technology of China |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
Graphene |
Keywords
Notes
849 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |