The publication database currently has 1600 entries.
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198 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
249 Film and Plasma Characteristics
85 Theses
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Atomic layer epitaxy of germanium
Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
Top Searches for August 2021
Most Searched Films
Search 1600 plasma ALD publications by:
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Top Precursor Searches - July 2021
| Number | Precursor | CAS# | Searches |
|---|---|---|---|
| 1 | BDEASi, SAM-24, Bis(diethylamido)silane, (Et2N)2SiH2 | 27804-64-4 | 99 |
| 2 | Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)3 | 33271-88-4 | 24 |
| 2 | Pentamethyl cyclopentadienyl titanium trimethoxide, Ti(CpMe5)(OMe)3 | 123927-75-3 | 24 |
| 2 | TBTDENb, Tris(diethylamido)(tert-butylimido)niobium, t-BuN=Nb(Et2N)3 | 210363-27-2 | 24 |
| 5 | TEMAHf, Tetrakis(EthylMethylAmido) Hafnium, (EtMeN)4Hf | 352535-01-4 | 16 |