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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Top Precursor Searches - July 2021

Number Precursor CAS# Searches
1BDEASi, SAM-24, Bis(diethylamido)silane, (Et2N)2SiH227804-64-499
2Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)333271-88-424
2Pentamethyl cyclopentadienyl titanium trimethoxide, Ti(CpMe5)(OMe)3123927-75-324
2TBTDENb, Tris(diethylamido)(tert-butylimido)niobium, t-BuN=Nb(Et2N)3210363-27-224
5TEMAHf, Tetrakis(EthylMethylAmido) Hafnium, (EtMeN)4Hf352535-01-416

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