December 2022 Stats


The publication database currently has 1658 entries.
204 Films
274 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5093 Authors

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2021 Year in Review
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Recent Database Additions
Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices

Top Precursor Searches - July 2021

Number Precursor CAS# Searches
1BDEASi, SAM-24, Bis(diethylamido)silane, (Et2N)2SiH227804-64-499
2Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)333271-88-424
2Pentamethyl cyclopentadienyl titanium trimethoxide, Ti(CpMe5)(OMe)3123927-75-324
2TBTDENb, Tris(diethylamido)(tert-butylimido)niobium, t-BuN=Nb(Et2N)3210363-27-224
5TEMAHf, Tetrakis(EthylMethylAmido) Hafnium, (EtMeN)4Hf352535-01-416

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