2021 Year in Review
The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses
Use Advanced Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
Search 1628 plasma ALD publications by:
Top Precursor Searches - July 2021
| Number | Precursor | CAS# | Searches |
|---|---|---|---|
| 1 | BDEASi, SAM-24, Bis(diethylamido)silane, (Et2N)2SiH2 | 27804-64-4 | 99 |
| 2 | Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)3 | 33271-88-4 | 24 |
| 2 | Pentamethyl cyclopentadienyl titanium trimethoxide, Ti(CpMe5)(OMe)3 | 123927-75-3 | 24 |
| 2 | TBTDENb, Tris(diethylamido)(tert-butylimido)niobium, t-BuN=Nb(Et2N)3 | 210363-27-2 | 24 |
| 5 | TEMAHf, Tetrakis(EthylMethylAmido) Hafnium, (EtMeN)4Hf | 352535-01-4 | 16 |