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The publication database currently has 1567 entries.
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195 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
242 Film and Plasma Characteristics
84 Theses
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Search 1567 plasma ALD publications by:
Search 1567 plasma ALD publications by:
Top Precursor Searches May 2021
| Number | Precursor | CAS# | Searches |
|---|---|---|---|
| 1 | Bis(diethylamino)silane, BDEAS, SAM-24, (Et2N)2SiH2 | 27804-64-4 | 96 |
| 2 | tris(dimethylamido)cyclopentadienyl hafnium, HfCp(NMe2)3 , Air Liquide HyALDTM | 0-0-0 | 44 |
| 3 | TDMASn, (Me2N)4Sn, [(CH3)2N]4Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide | 1066-77-9 | 39 |
| 4 | BTBAS, ((CH3)3CNH)2SiH2, Bis(Tert-ButylAmido) Silane | 186598-40-3 | 21 |
| 5 | Dicobalt Hexacarbonyl Tert-ButylAcetylene (CCTBA) | 56792-69-9 | 18 |
| 6 | TBTDEN, Tris(diethylamido)(tert-butylimido)niobium | 210363-27-2 | 15 |
| 7 | Air Liquide Star-Ti, Ti(CpMe3)(OMe)3 | 123927-75-3 | 14 |
| 8 | Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe2)3 | 33271-88-4 | 13 |
| 9 | Bis(t-butylimido)bis(dimethylamino)molybdenum | 923956-62-1 | 13 |
| 10 | DiButylTinDiAcetate, DBTDA, ((CH3CO2)2Sn[(CH2)3CH3]2) | 1067-33-0 | 12 |
| 11 | Tetraethyl Tin, Tetraethyltin, Et4Sn, (CH3CH2)4Sn, (C2H5)4Sn | 597-64-8 | 12 |