Your search for plasma enhanced atomic layer deposition publications discussing Wear Rate returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films|
|2||Plasma-enhanced atomic layer deposition of titanium vanadium nitride|
|3||Tribological properties of thin films made by atomic layer deposition sliding against silicon|
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