Dispersion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Dispersion returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A comparative study of AlN and Al₂O₃ based gate stacks grown by atomic layer deposition on InGaAs
2	A comparison between HfO₂/Al₂O₃ nano-laminates and ternary Hf_xAl_yO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
3	Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al₂O₃
4	Interfacial and electrical properties of Al₂O₃/HfO₂ bilayer deposited by atomic layer deposition on GeON passivated germanium surface

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