Barrier Height Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Barrier Height returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al₂O₃ Thin Films
2	Highly transparent low capacitance plasma enhanced atomic layer deposition Al₂O₃-HfO₂ tunnel junction engineering
3	Plasma-assisted atomic layer deposition of TiN/Al₂O₃ stacks for metal-oxide-semiconductor capacitor applications
4	Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

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