Publication Information

Title: Direct measurement of coherent phonon dynamics in solution-processed stibnite thin films

Type: Journal

Info: PHYSICAL REVIEW B 90, 035208 (2014)

Date: 2014-07-01

DOI: http://dx.doi.org/10.1103/PhysRevB.90.035208

Author Information

Name

Institution

Wee Kiang Chong

Nanyang Technological University

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 200C

TMA, AlMe3, Trimethyl Aluminum

75-24-1

Where to buy precursor

O2, Oxygen

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

205


Mark Sowa

Shortcuts

Films
Precursors
Deposition Hardware
Authors
Film and Plasma Characteristics
Multi-factor Search
ALD and PEALD Background
On-line PEALD Theses
About plasma-ald.com

Contact Us
ALD Links

© 2014-2019 plasma-ald.com