Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights

Type:
Journal
Info:
Neuromorph. Comput. Eng. 2 (2022) 024001
Date:
2022-03-07

Author Information

Name Institution
Laura Bégon-LoursIBM Research, Zurich Research Lab
Mattia HalterIBM Research, Zurich Research Lab
Marilyne SousaIBM Research, Zurich Research Lab
Youri PopoffIBM Research, Zurich Research Lab
Diana Dávila PinedaIBM Research, Zurich Research Lab
Donato Francesco FalconeIBM Research, Zurich Research Lab
Zhenming YuIBM Research, Zurich Research Lab
Steffen ReidtIBM Research, Zurich Research Lab
Lorenzo BenattiUNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari'
Francesco Maria PuglisiUNIMORE - Dipartimento di Ingegneria 'Enzo Ferrari'
Bert Jan OffreinIBM Research, Zurich Research Lab

Films

Plasma TiN


Plasma WO3



Film/Plasma Properties

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Ferroelectricity
Analysis: Ferroelectrical Testing

Substrates

SiO2

Notes

1684