Your search for plasma enhanced atomic layer deposition publications discussing WO3 films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization|
|2||Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition|
|3||Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma|
|4||Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films|
|5||The important role of water in growth of monolayer transition metal dichalcogenides|
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