(ethylcyclopentadienyl) (1, 5-cyclooctodiene) Iridium, Ir(EtCp)(COD), CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
2Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
3Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
4Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
5Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process