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2024 Year in Review


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(ethylcyclopentadienyl) (1, 5-cyclooctodiene) Iridium, Ir(EtCp)(COD), CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
2Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
3Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer
4Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
5Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process

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