Abacus, CAS# 0-0-0

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1PEALD of Copper using New Precursors for Next Generation of Interconnections
2Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
3Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
4Copper-ALD Seed Layer as an Enabler for Device Scaling