Search 1628 plasma ALD publications by:
TDMAGe, (Me2N)4Ge, [(CH3)2N]4Ge, Tetrakis(DiMethylAmido) Germanium, Germanium Dimethylamide, CAS# 7344-40-3
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.