Your search for plasma enhanced atomic layer deposition publications discussing TCR, Temperature Coefficient of Resistivity returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition|
|2||Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma|
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