TCR, Temperature Coefficient of Resistivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing TCR, Temperature Coefficient of Resistivity returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2	Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H₂ + 95% N₂) plasma

Follow @PlasmaALDGuy

Mark Sowa

Shortcuts

Films

Precursors

Deposition Hardware

Authors

Film and Plasma Characteristics

Multi-factor Search

ALD and PEALD Background

On-line PEALD Theses

About plasma-ald.com

ALD Links