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Template-assisted synthesis of III-nitride and metal-oxide nano-heterostructures using low-temperature atomic layer deposition for energy, sensing, and catalysis applications (Presentation Recording)
Type:
Conference Proceedings
Info:
Proc. SPIE 9553, Low-Dimensional Materials and Devices, 95530C (August 26, 2015);
Date:
2015-08-09
Author Information
| Name | Institution |
|---|---|
| Necmi Biyikli | Bilkent University |
| Çağla Özgit | Bilkent University |
| Hamit Eren | Bilkent University |
| Ali Haider | Bilkent University |
| Tamer Uyar | Bilkent University |
| Fatma Kayaci | Bilkent University |
| Mustafa Ozgur Guler | Bilkent University |
| Ruslan Garifullin | Bilkent University |
| Ali Kemal Okyay | Bilkent University |
| Gamze M. Ulusoy | Bilkent University |
| Eda Goldenberg | Bilkent University |
Films
Plasma AlN
Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
Film/Plasma Properties
Substrates
Notes
| Review talk covering ZnO, TiO2, HfO2, ZrO2, Al2O3, AlN, GaN, InN, and BN. Difficult to determine what films used PEALD from abstract. See authors other publications for details on their plasma ALD films. |
| 540 |