GaN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaN films returned 41 record(s).

Number	Title
1	Self-Limiting Growth of GaN at Low Temperatures
2	Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
3	Layer-by-layer epitaxial growth of GaN at low temperatures
4	Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
5	Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
6	Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
7	Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
8	Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
9	Epitaxial GaN using Ga(NMe₂)₃ and NH₃ plasma by atomic layer deposition
10	Perspectives on future directions in III-N semiconductor research
11	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
12	Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
13	Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
14	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
15	A route to low temperature growth of single crystal GaN on sapphire
16	Protective capping and surface passivation of III-V nanowires by atomic layer deposition
17	Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH₃
18	Gallium nitride thin films by microwave plasma-assisted ALD
19	Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
20	Atomic layer deposition of GaN at low temperatures
21	Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
22	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures

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GaN Plasma Enhanced Atomic Layer Deposition Film Publications