GaN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaN films returned 41 record(s).

Number	Title
1	Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
2	Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
3	Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH₃
4	Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
5	Gallium nitride thin films by microwave plasma-assisted ALD
6	Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
7	Self-Limiting Growth of GaN at Low Temperatures
8	Perspectives on future directions in III-N semiconductor research
9	Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
10	Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
11	Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
12	Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
13	A route to low temperature growth of single crystal GaN on sapphire
14	Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
15	Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
16	Epitaxial GaN using Ga(NMe₂)₃ and NH₃ plasma by atomic layer deposition
17	Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
18	Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
19	Atomic layer deposition of GaN at low temperatures
20	Layer-by-layer epitaxial growth of GaN at low temperatures
21	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
22	Protective capping and surface passivation of III-V nanowires by atomic layer deposition

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GaN Plasma Enhanced Atomic Layer Deposition Film Publications