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Plasma Enhanced Atomic Layer Deposition Film Publications

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NumberTitle
1Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
2Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
3Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
4Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks