2022 Year in Review

August 2023 Stats

The publication database currently has 1692 entries.

210 Films

283 Precursors

78 Dep Hardware Sets

255 Characteristics

94 Theses

5191 Authors

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2021 Year in Review

Recent Database Additions

Ferroelectricity of Hf_xZr_1-xO₂ thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier Self-limiting diamond growth from alternating CF_x and H fluxes Sub-10-nm ferroelectric Gd-doped HfO₂ layers

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Work function tuning of plasma-enhanced atomic layer deposited WC_xN_y electrodes for metal/oxide/semiconductor devices
2	Work function tuning of plasma-enhanced atomic layer deposited WC_xN_y electrodes for metal/oxide/semiconductor devices
3	Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO₂ gate stacks
4	Metal-insulator-semiconductor structure using Ga₂O₃ layer by plasma enhanced atomic layer deposition