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2024 Year in Review


The publication database currently has 1748 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5407 Authors

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
2Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
3Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
4Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks

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