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Trisilylamine [N(SiH3)3], CAS# 13862-16-3

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
2Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
3Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
4The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer

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