CH4, Methane, CAS# 74-82-8

Where to buy

NumberVendorRegionLink
1Yoodatech (Shanghai) Co., LtdCH4, Methane - contact maggie@yoodatech.com

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Carbon content control of silicon oxycarbide film with methane containing plasma
2Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
3Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
4Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
5Atomic Layer Deposition of Nanolayered Carbon Films