Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas|
|2||Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases|
|3||Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects|
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