Cu(acac)2, Copper(II) acetylacetonate, Bis(2,4-pentanedionato) copper(II), Cupric acetylacetonate, CAS# 13395-16-9

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Hydrogen plasma-enhanced atomic layer deposition of copper thin films
2Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
3Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers
4Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
5Radical Enhanced Atomic Layer Deposition of Metals and Oxides


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