Your search for publications using this chemistry returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Hydrogen plasma-enhanced atomic layer deposition of copper thin films|
|2||Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications|
|3||Integration of Electrochemically Deposited Cu with Plasma Enhanced Atomic Layer Deposition-Grown Cu Seed Layers|
|4||Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage|
|5||Radical Enhanced Atomic Layer Deposition of Metals and Oxides|
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