Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers|
|2||Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition|
|3||Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material|
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