Plasma Potential Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Plasma Potential returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
2Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
3Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition