Introducing Plasma ALD, LLC's first in-house product.

An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Gas Sensing Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Sensing returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
2SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
3From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
4Surface and sensing properties of PE-ALD SnO2 thin film
5Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations