Gas Sensing Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Sensing returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
2Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
3From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
4Surface and sensing properties of PE-ALD SnO2 thin film
5Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations