Gas Sensing Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Gas Sensing returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations
2From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
3Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
4SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance
5Surface and sensing properties of PE-ALD SnO2 thin film