Your search for plasma enhanced atomic layer deposition publications discussing Gas Sensing returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing|
|2||Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations|
|3||SnO2 nanotubes fabricated using electrospinning and atomic layer deposition and their gas sensing performance|
|4||Surface and sensing properties of PE-ALD SnO2 thin film|
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