Conductance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Conductance returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
2Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
3MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
4Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
5Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors