Conductance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Conductance returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors
2Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
3Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
4MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
5Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries