Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic layer deposition of TiN for the fabrication of nanomechanical resonators|
|2||High-Reflective Coatings For Ground and Space Based Applications|
|3||Plasma enhanced atomic layer deposition of SiNx:H and SiO2|
|4||Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth|
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