Film Stress Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
2High-Reflective Coatings For Ground and Space Based Applications
3Plasma enhanced atomic layer deposition of SiNx:H and SiO2
4Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth


Shortcuts

Films
Precursors
Deposition Hardware
Authors
Film and Plasma Characteristics
Multi-factor Search
ALD and PEALD Background
On-line PEALD Theses
About plasma-ald.com

Contact Us
ALD Links

© 2014-2019 plasma-ald.com