Film Stress Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
2High-Reflective Coatings For Ground and Space Based Applications
3Plasma enhanced atomic layer deposition of SiNx:H and SiO2
4Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth


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