Film Stress Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
2Residual stress study of thin films deposited by atomic layer deposition
3Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
4Plasma enhanced atomic layer deposition of SiNx:H and SiO2
5High-Reflective Coatings For Ground and Space Based Applications