Film Stress Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Film Stress returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1High-Reflective Coatings For Ground and Space Based Applications
2Residual stress study of thin films deposited by atomic layer deposition
3Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
4Plasma enhanced atomic layer deposition of SiNx:H and SiO2
5Atomic layer deposition of TiN for the fabrication of nanomechanical resonators