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Publication Information

Title: Atomic layer deposition of Co3O4 on carbon nanotubes/carbon cloth for high-capacitance and ultrastable supercapacitor electrode

Type: Journal

Info: 2015 Nanotechnology 26 094001

Date: 2015-01-06

DOI: http://dx.doi.org/10.1088/0957-4484/26/9/094001

Author Information

Name

Institution

National University Singapore

Nanjing University

Nanyang Technological University

Nanjing University

Nanyang Technological University

Nanjing University

National University Singapore

Films

Plasma CoOx using Picosun R200

Deposition Temperature = 100C

12078-25-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

Zeiss Ultra 60 FE-SEM

Images

TEM, Transmission Electron Microscope

JEOL 2010F

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Kratos Analytical Axis Ultra DLD

Electrochemical Performance

CV, Cyclic Voltammetry

Solartron 1470E

Substrates

CNTs, Carbon NanoTubes

Carbon Cloth

Silicon

Keywords

Supercapacitor

Notes

Picosun SUNALE R200 PEALD Co3O4 for supercapacitor application.

323



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