Han-Bo-Ram Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Han-Bo-Ram Lee returned 21 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Formation of Ni silicide from atomic layer deposited Ni
2Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition
3Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
4A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
5Plasma-Enhanced Atomic Layer Deposition of Ni
6Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor
7Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
8In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
9Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
10Very high frequency plasma reactant for atomic layer deposition
11Plasma-enhanced atomic layer deposition of Co on metal surfaces
12High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
13Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
14Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
15Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
16Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
17Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
18Degradation of the deposition blocking layer during area-selective plasma-enhanced atomic layer deposition of cobalt
19Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2
20Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
21Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant