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Plasma-enhanced atomic layer deposition of Co on metal surfaces
Type:
Journal
Info:
Surface & Coatings Technology 264 (2015) 60-65
Date:
0000-00-00
Author Information
| Name | Institution |
|---|---|
| Jaehong Yoon | Yonsei University |
| Jeong-Gyu Song | Yonsei University |
| Hyunjun Kim | Yonsei University |
| Han-Bo-Ram Lee | Incheon National University |
Films
Plasma Co
Film/Plasma Properties
Characteristic: Magnetic Properties
Analysis: VSM, Vibrating Sample Magnetometer
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Interfacial Layer
Analysis: TEM, Transmission Electron Microscope
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Substrates
| Si(001) |
| SiO2 |
| Ru |
| Ta |
Notes
| 1589 |