Nicholas A. Strnad Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicholas A. Strnad returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
2Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride