ASM Eagle 12 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Eagle 12 hardware returned 4 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1WS2 transistors on 300 mm wafers with BEOL compatibility
2Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
3Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
4Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents