ASM Eagle 12 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Eagle 12 hardware returned 4 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates
2Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
3Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: impact of reducing agents
4WS2 transistors on 300 mm wafers with BEOL compatibility