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Hf tetra-tert-butoxide, Hf[OC(CH3)3]4, Hf[OC(Me)3]4, CAS# 2172-02-3

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Hafnium(IV) t-butoxide (99.9%-Hf, <1.5%-Zr)
2EpiValenceHafnium tert-butoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

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