TaF5, Tantalum Pentafluoride, CAS# 7783-71-3

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
2A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films


Shortcuts



© 2014-2019 plasma-ald.com