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Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films|
|2||A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films|
|3||Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma|
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